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Semiconductor manufacturing technology textbook recommendations

I'm considering purchasing a textbook for self study on semiconductor manufacturing technology and have come across a possible candidate published by the SPIE: Introduction to Semiconductor Manufacturing Technology, 2ed, HongXiao, 2012, 704pp, ISBN: 9780819490926, Volume: PM220.

I'm holding off buying it straight away, even though it is a member's sale special, because the review says it has a minimal amount of maths, physics or chemistry. If I'm going to buy it, I want something a bit meatier. The maths and physics I can most probably find in a semiconductor physics text, but it's the chemistry I'd like to have a bit more depth.

Any recommendations?

Thanks in advance.